Overview

AIN Heater

Repair

Process & Repair scope

AIN Heater

AMAT AlN Heater (300mm)

Process Equipment Mode Type Part Number
CVD AlN Heater PAA66535
CVD AlN Heater PAA66353
CVD AlN Heater PAA64935
CVD AlN Heater PAA42505
CVD AlN Heater PAA38755
CVD AlN Heater PAA12505
CVD AlN Heater 0195-01314
CVD AlN Heater 0195-01037
CVD Producer AlN Heater 0190-05083
CVD V7 Vacuum purge AlN Heater 0041-49879
CVD V7 Vacuum purge AlN Heater 0041-33747
CVD V7 Vacuum purge AlN Heater 0041-33746
CVD V7 Vacuum purge AlN Heater 0041-08919
CVD CWxZ AlN Heater 0041-04789
CVD V7 Vacuum purge AlN Heater 0041-04679
CVD Producer AlN Heater 0041-01652
CVD Producer AlN Heater 0040-89894
CVD V7 Vacuum purge AlN Heater 0040-88188
CVD V7 Vacuum purge AlN Heater 0040-88097
CVD Producer AlN Heater 0040-85725
CVD Producer AlN Heater 0040-85475
CVD Producer AlN Heater 0040-84715
CVD Producer AlN Heater 0040-84051
CVD V7 Vacuum purge AlN Heater 0040-83188
CVD Producer AlN Heater 0040-82421
CVD AlN Heater 0040-64460
CVD V7 Vacuum purge AlN Heater 0040-54449
CVD Producer AlN Heater 0040-53976
CVD Producer AlN Heater 0040-49020
CVD Producer AlN Heater 0040-44585
CVD CWxZ AlN Heater 0040-42541
CVD Producer AlN Heater 0040-42270
CVD AlN Heater 0040-40635
CVD V7 Vacuum purge AlN Heater 0040-39695
CVD V7 Vacuum purge AlN Heater 0040-34698
CVD V7 Vacuum purge AlN Heater 0040-08529
CVD Producer AlN Heater 0040-07033
CVD Producer AlN Heater 0040-07031
CVD Producer AlN Heater 0040-07024
CVD Producer AlN Heater 0040-04048
CVD AlN Heater 0010-59798
CVD AlN Heater 0010-59789
CVD AlN Heater 0010-53901
CVD Producer AlN Heater 0040-36740
CVD Producer AlN Heater 0010-36738
CVD Producer AlN Heater 0010-36736 (Old Ver. 59787)
CVD Producer AlN Heater 0010-36736
CVD Producer AlN Heater 0010-36734
CVD Producer AlN Heater 0010-34715
CVD V7 Vacuum purge AlN Heater 0010-33992
CVD V7 Vacuum purge AlN Heater 0010-31987
CVD Producer AlN Heater 0010-31879
CVD Producer AlN Heater 0010-31871
CVD Producer AlN Heater 0010-31724
CVD Producer AlN Heater 0010-31709
CVD Producer AlN Heater 0010-31708
CVD CWxZ AlN Heater 0010-31396
CVD V7 Vacuum purge AlN Heater 0010-30987
CVD Producer AlN Heater 0010-30838
CVD V7 Vacuum purge AlN Heater 0010-29443
CVD Producer AlN Heater 0010-29128
CVD Producer AlN Heater 0010-28081
CVD V7 Vacuum purge AlN Heater 0010-26264
CVD Producer AlN Heater 0010-25416
CVD Producer AlN Heater 0010-24685
CVD V7 Vacuum purge AlN Heater 0010-24367
CVD Producer AlN Heater 0010-24300
CVD Producer AlN Heater 0010-24299
CVD Producer AlN Heater 0010-24189
CVD Producer AlN Heater 0010-23794
CVD Producer AlN Heater 0010-23014
CVD AlN Heater 0010-16893
CVD V7 Vacuum purge AlN Heater 0010-14700
CVD V7 Vacuum purge AlN Heater 0010-14007
CVD AlN Heater 0010-13459
CVD AlN Heater 0010-12813
CVD CWxZ AlN Heater 0010-12118
CVD Producer AlN Heater 0010-11908
CVD Producer AlN Heater 0010-11681
CVD CWxZ AlN Heater 0010-08621
CVD Producer AlN Heater 0010-08605
CVD Producer AlN Heater 0010-08265
CVD AlN Heater 0010-08167
CVD AlN Heater 0010-07938
CVD Producer AlN Heater 0010-07042
CVD Producer AlN Heater 0010-06598
CVD Producer AlN Heater 0010-04978
CVD Producer AlN Heater 0010-04461

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AMAT AlN Heater (200mm)

Process Equipment Mode Type Part Number
CVD Producer AlN Heater PAA63395
CVD Producer AlN Heater 0200-37359
CVD Producer AlN Heater 0200-35527
CVD Producer AlN Heater 0200-200MC
CVD DxZ AlN Heater 0190-03516
CVD Producer AlN Heater 0190-03501
CVD Producer AlN Heater 0040-MF612
CVD Producer AlN Heater 0040-86625
CVD Producer AlN Heater 0040-86263
CVD TixZ AlN Heater 0040-76255
CVD TixZ AlN Heater 0040-70479
CVD DxZ AlN Heater 0040-70479
CVD Producer AlN Heater 0040-70479
CVD AlN Heater 0010-62276
CVD DxZ AlN Heater 0010-61269
CVD Producer AlN Heater 0040-61269
CVD Producer AlN Heater 0040-61254
CVD Producer AlN Heater 0040-51612
CVD TixZ AlN Heater 0040-51306
CVD Producer AlN Heater 0040-47318
CVD CWxZ AlN Heater 0040-46818
CVD AlN Heater 0010-45637
CVD Producer AlN Heater 0040-45008
CVD DxZ AlN Heater 0010-42700
CVD TixZ AlN Heater 0040-42700
CVD DxZ AlN Heater 0040-40508
CVD Producer AlN Heater 0040-39947
CVD TixZ AlN Heater 0040-38105
CVD DxZ AlN Heater 0040-38097
CVD TixZ AlN Heater 0040-38097
CVD DxZ AlN Heater 0040-37952
CVD DxZ AlN Heater 0040-37593
CVD TixZ AlN Heater 0040-37359
CVD DCxZ AlN Heater 0040-37010
CVD DxZ AlN Heater 0040-37010
CVD DxZ AlN Heater 0040-36383
CVD DCxZ AlN Heater 0040-36219
CVD AlN Heater 0040-33788
CVD DcSxZ AlN Heater 0040-32712
CVD CWxZ AlN Heater 0040-08803
CVD CWxZ AlN Heater 0040-08621
CVD AlN Heater 0040-07953
CVD Producer AlN Heater 0040-02539
CVD DxZ AlN Heater 0040-02408
CVD DcSxZ AlN Heater 0040-02149
CVD AlN Heater 0040-01345
CVD DCxZ AlN Heater 0040-00939
CVD AlN Heater 0021-04666
CVD DxZ AlN Heater 0010-64431 (Old Ver. 0190-03516)
CVD Producer AlN Heater 0010-61428(Old Ver. 03840)
CVD AlN Heater 0010-59798 (Old Ver. 0010-30838)
CVD AlN Heater 0010-38516
CVD TixZ AlN Heater 0010-38493
CVD TixZ AlN Heater 0010-37784
CVD DcSxZ AlN Heater 0010-36631
CVD Producer AlN Heater 0010-29675
CVD Producer AlN Heater 0010-25415
CVD Producer AlN Heater 0010-25323
CVD TixZ AlN Heater 0010-18080
CVD Producer AlN Heater 0010-17871
CVD AlN Heater 0010-15108
CVD AlN Heater 0010-12815
CVD AlN Heater 0010-12814
CVD Producer AlN Heater 0010-12282
CVD Producer AlN Heater 0010-08901
CVD AlN Heater 0010-05030
CVD CWxZ AlN Heater 0010-04483
CVD CWxZ AlN Heater 0010-04421
CVD DCxZ AlN Heater 0010-03843
CVD Producer AlN Heater 0010-03841
CVD Producer AlN Heater 0010-03840
CVD Producer AlN Heater 0010-03287
CVD DxZ AlN Heater 0010-02467
CVD DxZ AlN Heater 0010-02461
CVD DxZ AlN Heater 0010-02342
CVD DcSxZ AlN Heater 0010-01933

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