Overview
MCA ESC Heater
Repair
Inspection
-
01.Visual
Crack
Chipping
Metal Residue
Contamination
Wire Broken
Terminal Block Missing
Damage to the SUS Parts
-
02.Surface Condition
Roughness
Flatness
Dimple Height
Groove Depth
Step Height
Dielectric Thickness
Bellows He Leak
-
03.Function
Resistivity
Insulation Resistance
Leakage Current
Capacitance
Wafer Backside Pressure(Ar)
Temperature Test
MCA
AMAT ENDURA MCA ESC (300mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| PVD | ENDURA | DT | 0200-02936 |
| PVD | ENDURA | DT | 0041-06180 |
| PVD | ENDURA | DT | 0020-08825 |
| PVD | ENDURA | HT | 0020-56201 |
| PVD | ENDURA | HT | 0010-54667 |
| PVD | ENDURA | HT | 0010-54292 |
| PVD | ENDURA | LT | 0010-53085 |
| PVD | ENDURA | HT | 0010-49223 |
| PVD | ENDURA | DT | 0010-42030 |
| PVD | ENDURA | DT | 0010-41276 |
| PVD | ENDURA | DT | 0010-33071 |
| PVD | ENDURA | DT | 0010-31581 |
| PVD | ENDURA | HT | 0010-27983 |
| PVD | ENDURA | HT | 0010-27431 |
| PVD | ENDURA | HT | 0010-27430 |
| PVD | ENDURA | LT | 0010-24456 |
| PVD | ENDURA | LT | 0010-24076 |
| PVD | ENDURA | LT | 0010-23803 |
| PVD | ENDURA | LT | 0010-23677 |
| PVD | ENDURA | HT | 0010-23068 |
| PVD | ENDURA | HT | 0010-23066 |
| PVD | ENDURA | LT | 0010-22985 |
| PVD | ENDURA | LT | 0010-22983 |
| PVD | ENDURA | HT | 0010-22184 |
| PVD | ENDURA | - | 0010-16102 |
| PVD | ENDURA | LT | 0010-14204 |
| PVD | ENDURA | LT | 0010-07815 |
| PVD | ENDURA | HT | 0010-06205 |
| PVD | ENDURA | HT | 0010-01925 |
| PVD | ENDURA | HT | 0010-01456 |
표를 클릭후 좌우로 드래그하세요
AMAT ENDURA MCA ESC (200mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| PVD | ENDURA | DT | 0190-00382 |
| PVD | ENDURA | LT | 0010-22411 |
| PVD | ENDURA | HT | 0010-21764 |
| PVD | ENDURA | - | 0010-21759 |
| PVD | ENDURA | - | 0010-21758 |
| PVD | ENDURA | LT | 0010-17831 |
| PVD | ENDURA | LT | 0010-17812 |
| PVD | ENDURA | HT | 0010-15961 |
| PVD | ENDURA | - | 0010-13897 |
| PVD | ENDURA | HT | 0010-13895 |
| PVD | ENDURA | LT | 0010-12516 |
| PVD | ENDURA | LT | 0010-08750 |
| PVD | ENDURA | HT | 0010-04450 |
| PVD | ENDURA | - | 0010-03366 |
| PVD | ENDURA | HT | 0010-03254 |
| PVD | ENDURA | HT | 0010-01926 |
| PVD | ENDURA | HT | 0010-01286 |
| PVD | ENDURA | LT | 0010-01166 |
| PVD | ENDURA | - | 0010-00381 |
표를 클릭후 좌우로 드래그하세요
