Overview

MCA ESC Heater

Repair

  • High Temp

  • Low Temp

  • DT ESC

  • C-Tap Type

  • Non C-Tap Type

Inspection

  • 01.Visual

    Crack

    Chipping

    Metal Residue

    Contamination

    Wire Broken

    Terminal Block Missing

    Damage to the SUS Parts

  • 02.Surface Condition

    Roughness

    Flatness

    Dimple Height

    Groove Depth

    Step Height

    Dielectric Thickness

    Bellows He Leak

  • 03.Function

    Resistivity

    Insulation Resistance

    Leakage Current

    Capacitance

    Wafer Backside Pressure(Ar

    Temperature Test

MCA

AMAT ENDURA MCA ESC (300mm)

Process Equipment Mode Type Part Number
PVD ENDURA DT 0200-02936
PVD ENDURA DT 0041-06180
PVD ENDURA DT 0020-08825
PVD ENDURA HT 0020-56201
PVD ENDURA HT 0010-54667
PVD ENDURA HT 0010-54292
PVD ENDURA LT 0010-53085
PVD ENDURA HT 0010-49223
PVD ENDURA DT 0010-42030
PVD ENDURA DT 0010-41276
PVD ENDURA DT 0010-33071
PVD ENDURA DT 0010-31581
PVD ENDURA HT 0010-27983
PVD ENDURA HT 0010-27431
PVD ENDURA HT 0010-27430
PVD ENDURA LT 0010-24456
PVD ENDURA LT 0010-24076
PVD ENDURA LT 0010-23803
PVD ENDURA LT 0010-23677
PVD ENDURA HT 0010-23068
PVD ENDURA HT 0010-23066
PVD ENDURA LT 0010-22985
PVD ENDURA LT 0010-22983
PVD ENDURA HT 0010-22184
PVD ENDURA - 0010-16102
PVD ENDURA LT 0010-14204
PVD ENDURA LT 0010-07815
PVD ENDURA HT 0010-06205
PVD ENDURA HT 0010-01925
PVD ENDURA HT 0010-01456

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AMAT ENDURA MCA ESC (200mm)

Process Equipment Mode Type Part Number
PVD ENDURA DT 0190-00382
PVD ENDURA LT 0010-22411
PVD ENDURA HT 0010-21764
PVD ENDURA - 0010-21759
PVD ENDURA - 0010-21758
PVD ENDURA LT 0010-17831
PVD ENDURA LT 0010-17812
PVD ENDURA HT 0010-15961
PVD ENDURA - 0010-13897
PVD ENDURA HT 0010-13895
PVD ENDURA LT 0010-12516
PVD ENDURA LT 0010-08750
PVD ENDURA HT 0010-04450
PVD ENDURA - 0010-03366
PVD ENDURA HT 0010-03254
PVD ENDURA HT 0010-01926
PVD ENDURA HT 0010-01286
PVD ENDURA LT 0010-01166
PVD ENDURA - 0010-00381

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