Overview
ESC
Repair
| Repair | Description | Issue |
|---|---|---|
| Level 1 | Surface retreatment | Surface roughness or flatness issue |
| Level 2 | Level 1 + Re-bonding | Bonding layer |
| Level 3 | Level 2 + Plate exchange | Crack or chipping on the ceramic plate |
| Level 4 | Level 3 + Heater plate exchange | Damage on the heater plate |
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Vigus/Vesta
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Producer-E
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E-Max/Super-E
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Speed
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DRM/SCCM
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Minos
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KIYO (374 / 608 / 611 / 620)
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Sym3
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Entron
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O3/O5/C4
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MK3/MK4
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PBN
Process & Repair scope
ESC New
Super-E / E-max 8”
| ITEM | UNIT | OEM | JESCO | REMARK |
|---|---|---|---|---|
| Ceramic Puck | - | AlN | AlN | |
| Purity | % | ≥99.9 | ≥99.9 | |
| Volume Resistivity | Ω.㎝ | 1010 ~ 1012 | 1010 ~ 1012 | @500V |
| Thermal Conductivity | W/mK | 90 | 90 | @RT |
| Density | g/㎤ | 3.26 | 3.26 | |
| Bonding Material | - | Same with OEM | Damage on the heater plate | |
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KIYO ESC 12"
| ITEM | L374 | L608 | L611 | L620 | L632 |
|---|---|---|---|---|---|
| Repair Scope | L0/L1/L2/L3/L4 | L0/L1/L2/L3/L4 | L0/L1/L2/L3/L4 | L0/L1/L2/L3/L4 | L1/L2/L4 |
| Part Number | 839-019090-374 | 839-019090-608 | 839-019090-611 | 839-019090-620 | 839-019090-632 |
| Ceramic Material | OEM Al2O3 94%, JESCO Al2O3 96% | ||||
| Printing Layer | Single | Single | Single | Single | Multi |
| Heater Zone | 2 Zone | 4 Zone | 4 Zone | 4 Zone | 4 Zone |
| Plate Size | Φ 295.25 | Φ 295.75 | Φ 297.88 | ||
| Embossing Size | Φ 0.25 | Φ 1.0 | Φ 1.5 | ||
| Silicone Bonding(Heater) | Same Method | ||||
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Ultima 8”/12”
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Ultima 8"
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Ultima 12"
ESC
Kiyo 300mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Kiyo | Al2O3 Plate | 839-019090-608 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-611 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-620 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-632 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-374 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-328 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-324 |
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Kiyo 12-8"
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Kiyo | Al2O3 Plate | 839-019090-226 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-225 |
| ETCH | Kiyo | Al2O3 Plate | 839-019090-223 |
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E-Max/Super-E
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Super-e | AlN Plate | 0040-39990 |
| ETCH | Super-e | AlN Plate | 0010-05966 |
| ETCH | E-Max | AlN Plate | 0040-05994 |
| ETCH | E-Max | AlN Plate | 0010-05971 |
| ETCH | E-Max | AlN Plate | 0040-40979 |
| ETCH | E-Max | AlN Plate | 0040-05493 |
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VESTA/SHIN/SCCM/JIN/VIGUS 300mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | VIGUS | Al2O3 Plate | 2L10-150079-13 |
| ETCH | VIGUS LK2 | Al2O3 Plate | 2L10-151441-11 |
| ETCH | VIGUS RK3 | Al2O3 Plate | 2L87-100888-12 |
| ETCH | VIGUS RK4 | Al2O3 Plate | 2L10-151982-11 |
| ETCH | SHIN | Al2O3 Plate | 3D10-150388-11 |
| ETCH | SHIN | Al2O3 Plate | 13311 type |
| ETCH | VESTA | Al2O3 Plate | 41611 type |
| ETCH | JIN | Al2O3 Plate | 3D87-057418-11 |
| ETCH | JIN | Al2O3 Plate | 3D10-100930-41 |
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Minos/Maya/4zone/SYM3
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Mesa G5/ Maya | Al2O3 Plate | 0041-75950 |
| ETCH | Mesa C3,HT (4zone) | Al2O3 Plate | 0041-50966 |
| ETCH | Mesa G5/ Maya | Al2O3 Plate | 0010-50850 |
| ETCH | Mesa G5/ Maya | Al2O3 Plate | 0010-48840 |
| ETCH | Mesa G5/ G 3.9(Minos) | Al2O3 Plate | 0010-47763 |
| ETCH | Mesa G5/ G 3.9(Minos) | Al2O3 Plate | 0010-37176 |
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Exelan/Flex 200mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Exelan | Al2O3 Plate | 839-440462-508 |
| ETCH | Exelan-HPT | Al2O3 Plate | 839-440462-518 |
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Exelan/Flex 12-8"
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Flex | Al2O3 Plate | 839-800327-265 |
| ETCH | Flex | Al2O3 Plate | 839-800327-243 |
| ETCH | Flex | Al2O3 Plate | 839-800327-212 |
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Exelan/Flex 300mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Flex | Al2O3 Plate | 839-800327-438 |
| ETCH | Flex 45 | Al2O3 Plate | 839-800327-432 |
| ETCH | Flex 45 | Al2O3 Plate | 839-800327-423 |
| ETCH | Flex | Al2O3 Plate | 839-800327-418 |
| ETCH | Flex | Al2O3 Plate | 839-800327-412 |
| ETCH | Flex | Al2O3 Plate | 839-800327-410 |
| ETCH | Flex | Al2O3 Plate | 839-800327-408 |
| ETCH | Flex | Al2O3 Plate | 839-800327-400 |
| ETCH | Flex | Al2O3 Plate | 839-800327-390 |
| ETCH | Flex | Al2O3 Plate | 839-800327-385 |
| ETCH | Flex | Al2O3 Plate | 839-800327-363 |
| ETCH | Flex | Al2O3 Plate | 839-800327-315 |
| ETCH | Flex | Al2O3 Plate | 839-800327-312 |
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Ultima
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| CVD | Ultima | Coating Type | 0040-18219 |
| CVD | Ultima | Coating Type | 0040-18208 |
| CVD | Ultima | Coating Type | 0040-18053 |
| CVD | Ultima | Coating Type | 0040-48594 |
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DPS 200mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | DPS-Metal Ass'y | AlN Plate | 0040-77771 |
| ETCH | DPS-Metal | AlN Plate | 0200-02813 |
| ETCH | DPS-Poly Ass'y | Coating Type | 0040-54755 |
| ETCH | DPS-Poly | Al2O3 Plate | 0195-07994 |
| ETCH | DPS-Puck(Poly) | AlN Plate | 0010-15668 |
| ETCH | DPSⅡ | AlN Plate | 0010-15452 |
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DPS 300mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | DPS-2 (G3 ) | Coating Type | 0190-25087 |
| ETCH | DPS 232 G2 OPUS | Al2O3 Plate | 0190-23942 |
| ETCH | DPSⅡ | Coating Type | 0040-33215 |
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Producer
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | Producer-e | AlN Plate | 0010-24774 |
| ETCH | Producer Georgia | AlN Plate | 0041-77859 |
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IPS
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | IPS | AlN Plate | 0040-61184 |
| ETCH | IPS | AlN Plate | 0010-39903 |
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Novellus Speed 200mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| CVD | Speed | Al2O3 Plate | 05-134263-00 |
| CVD | Speed | Al2O3 Plate | 02-134264-00 |
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Novellus speed 300mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| CVD | Speed | Al2O3 Plate | 02-375302-00 |
| CVD | Speed | Al2O3 Plate | 02-283811-00 |
| CVD | Speed | Al2O3 Plate | 02-267289-00 |
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SCCM/DRM 200mm
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | DRM | Al2O3 Plate | 21D10-101956-12 |
| ETCH | DRM | Al2O3 Plate | 1D85-009005-12 |
| ETCH | DRM | Al2O3 Plate | 1D10-101692-11 |
| ETCH | DRM | Al2O3 Plate | 1D10-101692-13 |
| ETCH | SCCM | Al2O3 Plate | 1810-121880-11 |
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