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Process & Repair scope
ESC-OPM
LAM Anodizing Chuck (200mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-082 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-081 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-283 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-282 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-281 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-082 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-081 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-066 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-818 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-812 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-811 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-802 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-801 |
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LAM Anodizing Chuck (150mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-065 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-061 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-361 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-265 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-262 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-261 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-065 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-061 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-634 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-632 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-622 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-614 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-612 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-602 |
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ESC-OPM
Varian ESC (200mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| IMP | Viista | Al2O3 Plate | E11135020 |
| IMP | E-500 | Si Rubber | E11098654 |
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