Overview
Others
Repair
TEL MK Heater Ring
Material
Aluminum Body , Al2O3 Ceramic Ring (heater included)
ESC-OPM
LAM Anodizing Chuck (200mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-082 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-081 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-283 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-282 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-281 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-082 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-081 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-066 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-818 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-812 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-811 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-802 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-801 |
표를 클릭후 좌우로 드래그하세요
LAM Anodizing Chuck (150mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-065 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094756-061 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-361 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-265 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-262 |
| ETCH | TCP 9400/9600 | Anodizing | 718-094523-261 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-065 |
| ETCH | TCP 9400/9600 | Anodizing | 718-092326-061 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-634 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-632 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-622 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-614 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-612 |
| ETCH | TCP 9400/9600 | Anodizing | 718-043893-602 |
표를 클릭후 좌우로 드래그하세요
Repair
AMAT AlN Heater (300mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| CVD | AlN Heater | PAA66535 | |
| CVD | AlN Heater | PAA66353 | |
| CVD | AlN Heater | PAA64935 | |
| CVD | AlN Heater | PAA42505 | |
| CVD | AlN Heater | PAA38755 | |
| CVD | AlN Heater | PAA12505 | |
| CVD | AlN Heater | 0195-01314 | |
| CVD | AlN Heater | 0195-01037 | |
| CVD | Producer | AlN Heater | 0190-05083 |
| CVD | V7 Vacuum purge | AlN Heater | 0041-49879 |
| CVD | V7 Vacuum purge | AlN Heater | 0041-33747 |
| CVD | V7 Vacuum purge | AlN Heater | 0041-33746 |
| CVD | V7 Vacuum purge | AlN Heater | 0041-08919 |
| CVD | CWxZ | AlN Heater | 0041-04789 |
| CVD | V7 Vacuum purge | AlN Heater | 0041-04679 |
| CVD | Producer | AlN Heater | 0041-01652 |
| CVD | Producer | AlN Heater | 0040-89894 |
| CVD | V7 Vacuum purge | AlN Heater | 0040-88188 |
| CVD | V7 Vacuum purge | AlN Heater | 0040-88097 |
| CVD | Producer | AlN Heater | 0040-85725 |
| CVD | Producer | AlN Heater | 0040-85475 |
| CVD | Producer | AlN Heater | 0040-84715 |
| CVD | Producer | AlN Heater | 0040-84051 |
| CVD | V7 Vacuum purge | AlN Heater | 0040-83188 |
| CVD | Producer | AlN Heater | 0040-82421 |
| CVD | AlN Heater | 0040-64460 | |
| CVD | V7 Vacuum purge | AlN Heater | 0040-54449 |
| CVD | Producer | AlN Heater | 0040-53976 |
| CVD | Producer | AlN Heater | 0040-49020 |
| CVD | Producer | AlN Heater | 0040-44585 |
| CVD | CWxZ | AlN Heater | 0040-42541 |
| CVD | Producer | AlN Heater | 0040-42270 |
| CVD | AlN Heater | 0040-40635 | |
| CVD | V7 Vacuum purge | AlN Heater | 0040-39695 |
| CVD | V7 Vacuum purge | AlN Heater | 0040-34698 |
| CVD | V7 Vacuum purge | AlN Heater | 0040-08529 |
| CVD | Producer | AlN Heater | 0040-07033 |
| CVD | Producer | AlN Heater | 0040-07031 |
| CVD | Producer | AlN Heater | 0040-07024 |
| CVD | Producer | AlN Heater | 0040-04048 |
| CVD | AlN Heater | 0010-59798 | |
| CVD | AlN Heater | 0010-59789 | |
| CVD | AlN Heater | 0010-53901 | |
| CVD | Producer | AlN Heater | 0040-36740 |
| CVD | Producer | AlN Heater | 0010-36738 |
| CVD | Producer | AlN Heater | 0010-36736 (Old Ver. 59787) |
| CVD | Producer | AlN Heater | 0010-36736 |
| CVD | Producer | AlN Heater | 0010-36734 |
| CVD | Producer | AlN Heater | 0010-34715 |
| CVD | V7 Vacuum purge | AlN Heater | 0010-33992 |
| CVD | V7 Vacuum purge | AlN Heater | 0010-31987 |
| CVD | Producer | AlN Heater | 0010-31879 |
| CVD | Producer | AlN Heater | 0010-31871 |
| CVD | Producer | AlN Heater | 0010-31724 |
| CVD | Producer | AlN Heater | 0010-31709 |
| CVD | Producer | AlN Heater | 0010-31708 |
| CVD | CWxZ | AlN Heater | 0010-31396 |
| CVD | V7 Vacuum purge | AlN Heater | 0010-30987 |
| CVD | Producer | AlN Heater | 0010-30838 |
| CVD | V7 Vacuum purge | AlN Heater | 0010-29443 |
| CVD | Producer | AlN Heater | 0010-29128 |
| CVD | Producer | AlN Heater | 0010-28081 |
| CVD | V7 Vacuum purge | AlN Heater | 0010-26264 |
| CVD | Producer | AlN Heater | 0010-25416 |
| CVD | Producer | AlN Heater | 0010-24685 |
| CVD | V7 Vacuum purge | AlN Heater | 0010-24367 |
| CVD | Producer | AlN Heater | 0010-24300 |
| CVD | Producer | AlN Heater | 0010-24299 |
| CVD | Producer | AlN Heater | 0010-24189 |
| CVD | Producer | AlN Heater | 0010-23794 |
| CVD | Producer | AlN Heater | 0010-23014 |
| CVD | AlN Heater | 0010-16893 | |
| CVD | V7 Vacuum purge | AlN Heater | 0010-14700 |
| CVD | V7 Vacuum purge | AlN Heater | 0010-14007 |
| CVD | AlN Heater | 0010-13459 | |
| CVD | AlN Heater | 0010-12813 | |
| CVD | CWxZ | AlN Heater | 0010-12118 |
| CVD | Producer | AlN Heater | 0010-11908 |
| CVD | Producer | AlN Heater | 0010-11681 |
| CVD | CWxZ | AlN Heater | 0010-08621 |
| CVD | Producer | AlN Heater | 0010-08605 |
| CVD | Producer | AlN Heater | 0010-08265 |
| CVD | AlN Heater | 0010-08167 | |
| CVD | AlN Heater | 0010-07938 | |
| CVD | Producer | AlN Heater | 0010-07042 |
| CVD | Producer | AlN Heater | 0010-06598 |
| CVD | Producer | AlN Heater | 0010-04978 |
| CVD | Producer | AlN Heater | 0010-04461 |
표를 클릭후 좌우로 드래그하세요
AMAT AlN Heater (200mm)
| Process | Equipment Mode | Type | Part Number |
|---|---|---|---|
| CVD | Producer | AlN Heater | PAA63395 |
| CVD | Producer | AlN Heater | 0200-37359 |
| CVD | Producer | AlN Heater | 0200-35527 |
| CVD | Producer | AlN Heater | 0200-200MC |
| CVD | DxZ | AlN Heater | 0190-03516 |
| CVD | Producer | AlN Heater | 0190-03501 |
| CVD | Producer | AlN Heater | 0040-MF612 |
| CVD | Producer | AlN Heater | 0040-86625 |
| CVD | Producer | AlN Heater | 0040-86263 |
| CVD | TixZ | AlN Heater | 0040-76255 |
| CVD | TixZ | AlN Heater | 0040-70479 |
| CVD | DxZ | AlN Heater | 0040-70479 |
| CVD | Producer | AlN Heater | 0040-70479 |
| CVD | AlN Heater | 0010-62276 | |
| CVD | DxZ | AlN Heater | 0010-61269 |
| CVD | Producer | AlN Heater | 0040-61269 |
| CVD | Producer | AlN Heater | 0040-61254 |
| CVD | Producer | AlN Heater | 0040-51612 |
| CVD | TixZ | AlN Heater | 0040-51306 |
| CVD | Producer | AlN Heater | 0040-47318 |
| CVD | CWxZ | AlN Heater | 0040-46818 |
| CVD | AlN Heater | 0010-45637 | |
| CVD | Producer | AlN Heater | 0040-45008 |
| CVD | DxZ | AlN Heater | 0010-42700 |
| CVD | TixZ | AlN Heater | 0040-42700 |
| CVD | DxZ | AlN Heater | 0040-40508 |
| CVD | Producer | AlN Heater | 0040-39947 |
| CVD | TixZ | AlN Heater | 0040-38105 |
| CVD | DxZ | AlN Heater | 0040-38097 |
| CVD | TixZ | AlN Heater | 0040-38097 |
| CVD | DxZ | AlN Heater | 0040-37952 |
| CVD | DxZ | AlN Heater | 0040-37593 |
| CVD | TixZ | AlN Heater | 0040-37359 |
| CVD | DCxZ | AlN Heater | 0040-37010 |
| CVD | DxZ | AlN Heater | 0040-37010 |
| CVD | DxZ | AlN Heater | 0040-36383 |
| CVD | DCxZ | AlN Heater | 0040-36219 |
| CVD | AlN Heater | 0040-33788 | |
| CVD | DcSxZ | AlN Heater | 0040-32712 |
| CVD | CWxZ | AlN Heater | 0040-08803 |
| CVD | CWxZ | AlN Heater | 0040-08621 |
| CVD | AlN Heater | 0040-07953 | |
| CVD | Producer | AlN Heater | 0040-02539 |
| CVD | DxZ | AlN Heater | 0040-02408 |
| CVD | DcSxZ | AlN Heater | 0040-02149 |
| CVD | AlN Heater | 0040-01345 | |
| CVD | DCxZ | AlN Heater | 0040-00939 |
| CVD | AlN Heater | 0021-04666 | |
| CVD | DxZ | AlN Heater | 0010-64431 (Old Ver. 0190-03516) |
| CVD | Producer | AlN Heater | 0010-61428(Old Ver. 03840) |
| CVD | AlN Heater | 0010-59798 (Old Ver. 0010-30838) | |
| CVD | AlN Heater | 0010-38516 | |
| CVD | TixZ | AlN Heater | 0010-38493 |
| CVD | TixZ | AlN Heater | 0010-37784 |
| CVD | DcSxZ | AlN Heater | 0010-36631 |
| CVD | Producer | AlN Heater | 0010-29675 |
| CVD | Producer | AlN Heater | 0010-25415 |
| CVD | Producer | AlN Heater | 0010-25323 |
| CVD | TixZ | AlN Heater | 0010-18080 |
| CVD | Producer | AlN Heater | 0010-17871 |
| CVD | AlN Heater | 0010-15108 | |
| CVD | AlN Heater | 0010-12815 | |
| CVD | AlN Heater | 0010-12814 | |
| CVD | Producer | AlN Heater | 0010-12282 |
| CVD | Producer | AlN Heater | 0010-08901 |
| CVD | AlN Heater | 0010-05030 | |
| CVD | CWxZ | AlN Heater | 0010-04483 |
| CVD | CWxZ | AlN Heater | 0010-04421 |
| CVD | DCxZ | AlN Heater | 0010-03843 |
| CVD | Producer | AlN Heater | 0010-03841 |
| CVD | Producer | AlN Heater | 0010-03840 |
| CVD | Producer | AlN Heater | 0010-03287 |
| CVD | DxZ | AlN Heater | 0010-02467 |
| CVD | DxZ | AlN Heater | 0010-02461 |
| CVD | DxZ | AlN Heater | 0010-02342 |
| CVD | DcSxZ | AlN Heater | 0010-01933 |
표를 클릭후 좌우로 드래그하세요
